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International Journal of Engineering، جلد ۲۷، شماره ۱۲، صفحات ۱۸۵۰-۱۸۵۴
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| عنوان فارسی |
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| چکیده فارسی مقاله |
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| کلیدواژه‌های فارسی مقاله |
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| عنوان انگلیسی |
Modelling of Resonance Frequency of MEMS Corrugated Diaphragm for Capacitive Acoustic Sensors (TECHNICAL NOTE) |
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| چکیده انگلیسی مقاله |
In this paper, a new model for resonance frequency of clamped circular corrugated diaphragm has been presented. First, an analytical analyzes has been carried out to derive mathematic expressions for mechanical sensitivity of diaphragm with residual stress. Next by using Rayleigh's method we present mathematical model to calculate the resonance frequency of corrugated diaphragm and investigate the effect of residual stress, Young modulus and corrugation numbers on resonance frequency of diaphragm. In this work, MATLAB software for analytical analyzes and Intellisuite MEMS tool for finite element simulation have been used. The analytical and simulated results have been compared together and there is good agreement between them. |
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| کلیدواژه‌های انگلیسی مقاله |
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| نویسندگان مقاله |
mehdi taybi |
Electerical Engineering, Markazi province.Unit.ACECR
bahram azizollah Ganji |
Electrical Engineering, Babol University of Technology
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| نشانی اینترنتی |
http://www.ije.ir/article_72429_48600a9b594d57800ff3f9c96860161b.pdf |
| فایل مقاله |
اشکال در دسترسی به فایل - ./files/site1/rds_journals/409/article-409-2062600.pdf |
| کد مقاله (doi) |
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| زبان مقاله منتشر شده |
en |
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