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International Journal of Engineering، جلد ۲۵، شماره ۳، صفحات ۱۶۷-۱۷۴
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| عنوان فارسی |
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| چکیده فارسی مقاله |
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| کلیدواژه‌های فارسی مقاله |
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| عنوان انگلیسی |
Design of Novel High Sensitive MEMS Capacitive Fingerprint Sensor |
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| چکیده انگلیسی مقاله |
In this paper a new design of MEMS capacitive fingerprint sensors is presented. The capacitive sensor is made of two parallel plates with air gap. In these sensors, the capacitance changes is very important factor. It is caused by deformation of the upper electrode of sensor. In this study with making slots in upper electrode, using T-shaped protrusion on diaphragm in order to concentrate the force from finger ridges, making holes in lower electrode to reduce the air damping and using low stress material for diaphragm, we have been succeeded to design a novel MEMS fingerprint sensor with high sensitivity compared with the previous one. In the present research, simulations were carried out using FEA method. |
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| کلیدواژه‌های انگلیسی مقاله |
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| نویسندگان مقاله |
Mojtaba Shams Nateri |
Electrical Engineering, Babol University of Technology
bahram azizollah Ganji |
Electrical Engineering, Babol University of Technology
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| نشانی اینترنتی |
http://www.ije.ir/article_72003_765e22ab72bb7344a37cfd658228a131.pdf |
| فایل مقاله |
اشکال در دسترسی به فایل - ./files/site1/rds_journals/409/article-409-2063013.pdf |
| کد مقاله (doi) |
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| زبان مقاله منتشر شده |
en |
| موضوعات مقاله منتشر شده |
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