|
|
International Journal of Engineering، جلد ۲۷، شماره ۱، صفحات ۶۳-۶۸
|
|
|
| عنوان فارسی |
|
|
| چکیده فارسی مقاله |
|
|
| کلیدواژه‌های فارسی مقاله |
|
|
| عنوان انگلیسی |
Accurate Model of Capacitance for MEMS Sensors using Corrugated Diaphragm with Residual Stress |
|
| چکیده انگلیسی مقاله |
In this paper we present a new model for calculating the capacitance of MEMS sensor with corrugated diaphragm. In this work the effect of residual stress is considered on deflection of diaphragm and capacitance of sensor. First, a new analytical analyzes have been carried out to derive mathematic expressions for central deflection of corrugated diaphragm and its relationship with residual stress. Then the capacitance and sensitivity of sensor using corrugated diaphragm with residual stress are calculated under various parameters such as bias voltage and pressure. The analytical results are compared with simulation using Finite Element Method (FEM). The results show that the new analytical model is very close with simulation results. |
|
| کلیدواژه‌های انگلیسی مقاله |
|
|
| نویسندگان مقاله |
Mehdi Taybi |
Electerical Engineering, Babol University of Technology
bahram azizollah Ganji |
Electrical Engineering, Babol University of Technology
|
|
| نشانی اینترنتی |
http://www.ije.ir/article_72233_c66594ca51abac0312f75430e0a6bb8f.pdf |
| فایل مقاله |
اشکال در دسترسی به فایل - ./files/site1/rds_journals/409/article-409-2062800.pdf |
| کد مقاله (doi) |
|
| زبان مقاله منتشر شده |
en |
| موضوعات مقاله منتشر شده |
|
| نوع مقاله منتشر شده |
|
|
|
|
برگشت به:
صفحه اول پایگاه |
نسخه مرتبط |
نشریه مرتبط |
فهرست نشریات
|