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International Journal of Engineering، جلد ۲۹، شماره ۳، صفحات ۳۲۱-۳۲۷
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| عنوان فارسی |
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| چکیده فارسی مقاله |
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| عنوان انگلیسی |
Design of High Sensitivity and Linearity Microelectromechanical Systems Capacitive Tire Pressure Sensor using Stepped Membrane |
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| چکیده انگلیسی مقاله |
This paper is focused on a novel design of stepped diaphragm for MEMS capacitive pressure sensor used in tire pressure monitoring system. The structure of sensor diaphragm plays a key role for determining the sensitivity of the sensor and the non-linearity of the output.First the structures of two capacitive pressure sensors with clamped square flatdiaphragms, with different thicknesses are investigatedand their sensitivity and non-linearityare compared together.Finally for increasing the sensitivity and linearity,anew capacitive pressure sensor with a stepped diaphragm is introduced. A numerical solution for determination of theaccurate sensitivity of the sensor is presented.The results show that the sensitivity of the sensor is increased from 0.063 fF/KPa with flat diaphragm to 0.107 fF/KPa with stepped diaphragm and also the non-linearity is decreased from 2.37% to 1.857%. In this design, the sensor sensitivity and output linearity are increased simultaneously. |
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| کلیدواژه‌های انگلیسی مقاله |
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| نویسندگان مقاله |
Maryam Norouznejad Jelodar |
Electerical Engineering, Babol University of Technology
bahram azizollah Ganji |
Electrical Engineering, Babol University of Technology
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| نشانی اینترنتی |
http://www.ije.ir/article_72682_33eb37959bc99b2d3ddfefdbf515e140.pdf |
| فایل مقاله |
اشکال در دسترسی به فایل - ./files/site1/rds_journals/409/article-409-2062346.pdf |
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| زبان مقاله منتشر شده |
en |
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